Onto Innovation Enhances Leadership Team with Two Senior Executive Appointments 416k4i

WILMINGTON, Mass., June 12, 2025 — Onto Innovation Inc. (NYSE: ONTO) (“Onto Innovation,” “Onto,” or the “Company”) today announced the appointment of Brian Roberts as chief financial officer and Shirley Chen as senior vice president of customer success, strengthening its leadership team as the Company continues to advance its strategic objectives. Both appointments are effective as of June 16, 2025. 5io47

“The semiconductor industry remains one of the fastest-paced sectors globally,” says Mike Plisinski, chief executive officer of Onto Innovation. “Sustaining this pace while transforming the organization to achieve new levels of performance requires a leadership team that is adaptable with exceptional communication and leadership skills. Brian and Shirley each bring an incredible depth of relevant experience that will contribute to the acceleration of our strategy to the benefit of all stakeholders.”

Both Brian and Shirley will report to Mike Plisinski. Brian will be based in Wilmington, Massachusetts, and Shirley will be based in Milpitas, California.

Brian Roberts – Chief Financial Officer

Seasoned financial executive to drive operational excellence

Brian brings to Onto Innovation broad financial, operational and leadership experience gained over his 30 year career with a track record of scaling organizations, improving margin performance and maximizing capital allocation.

With 20 years of experience as a CFO, 11 years for public companies in industries such as biotech, software and semiconductors, Brian has demonstrated the ability to rapidly scale high growth organizations while delivering on or exceeding company financial goals. He was most recently the CFO of Sensata Technologies, a publicly traded (NYSE: ST) global semiconductor technology company with approximately $4 billion in revenue in 2024 and over 20 factories around the globe.

“I am excited for the opportunity to work with Mike and the team to Onto on the growth journey ahead,” commented Brian Roberts. “With a long history of leading-edge innovation, Onto is uniquely positioned with the technology and capabilities to its customers’ goals to accelerate their product development, increase yields and reduce costs. I believe my experience building scale in global operations, M&A, and organizational development will contribute to improving operating margins and creating lasting value for our stakeholders.”

Mark Slicer will be transitioning out of Onto Innovation and pursuing other opportunities. Mark will be available to a smooth transition. “On behalf of the Onto Innovation team, I want to thank Mark for his contributions over the past three years. I wish him all the best in his future endeavors,” added Mr. Plisinski.

Shirley Chen – Senior Vice President of Customer Success

Industry veteran to strategically align Onto’s technology with evolving customer needs

Shirley will lead Onto’s experienced team of sales, applications and service professionals to enable customers to achieve maximum value from Onto Innovation’s comprehensive process control and lithography solution suite.

An industry veteran, Shirley brings 25 years of semiconductor experience, including 18 years of progressive sales leadership roles at KLA and Thermo-Fisher. Shirley ed KLA as senior manager of business development, eventually leading semiconductor process control products worldwide from software to metrology and inspection equipment for wafer/mask as the vice president of sales and business development. Shirley later ed Thermo-Fisher leading the commercial team for Thermo Fischer Scientifics Global Semiconductor division. At Thermo, she led a team of 800+ professionals across sales, sales operations, sales enablement, and field applications, advancing the adoption of electron microscopy solutions for semiconductor failure analysis and metrology workflows. Shirley’s experience also includes marketing leadership and process engineering roles at FormFactor and Intel.

Shirley Chen commented, “I’m excited to Onto at such a pivotal time. The Company has a strong foundation and bold ambitions, and I’m looking forward to accelerating growth, expanding our impact, and unlocking new opportunities with this exceptional team.”